Epitaxial Equipment : MBE Components

UNI-Bulb RF Plasma Source Autotuner

Veeco introduces an upgrade to the Veeco plasma source that enables hands free operation using the new Plasma Autotuning unit. The Autotuner automatically adjusts and maintains the optimal plasma source conditions removing the need for manual adjustments during your experiments. For example, if your operating conditions such as gas flow or power level frequently change, the Autotuner would be an excellent solution to automate your process. The Veeco Autotuner is offered as a direct replacement for the Veeco Manual Tuner and works with existing power supplies.

 

The Veeco RF Plasma Source has been an extremely popular product in the MBE community since its inception in 1996. The plasma sources have proven to be excellent material delivery systems for oxide and nitride applications due to their stability and reproducibility. With the addition of the Autotuner, the Veeco RF Plasma Source ensures stable growth conditions and optimizes power efficiencies.