Metrology & Instrumentation
Process Equipment
Epitaxial Equipment
Solutions for a nanoscale world.™

Epitaxial Equipment : MBE Sources

Low Temperature

Ammonia Resistant Sources  
Ammonia Resistant Sources   
These extended life sources for ammonia environments allow operation at higher temperatures and partial pressures enabling increased campaign time and minimized repair costs.
 
Arsenic Valved Cracker  
Arsenic Valved Cracker    New
The patented Veeco Valved Cracker for Arsenic revolutionized solid source molecular beam epitaxy (MBE) by providing the convenience of a gas source with the safety of a solid source.
 
Corrosive Series Valved Cracker  
Corrosive Series Valved Cracker    New
This patented source is the only source on the market today utilizing an all-PBN, corrosion resistant crucible and valve mechanism offering valved flux control for reactive high-vapor pressure materials.
 
Dual Filament Source  
Dual Filament Source   
This source provides optimal performance at lower operating temperatures, rapid flux stabilization and excellent long-term flux stability.
 
Oxygen Resistant Sources  
Oxygen Resistant Sources   
These extended life sources for oxygen environments allow operation at higher temperatures and partial pressures enabling increased campaign time and minimized repair costs.
 
Phosphorus Valved Cracker  
Phosphorus Valved Cracker   
Provides a controlled and reproducible P2 flux from a solid phosphorus charge, with in-situ conversion from red phosphorus to white phosphorus.
 
Selenium Valved Cracker  
Selenium Valved Cracker    New
This corrosion-resistant source provides nearly instantaneous flux modulation and on/off control for efficient material conservation.
 
Single Filament Source  
Single Filament Source   
This source is a cost-effective solution for low-temperature evaporation providing stable and consistent fluxes of high vapor pressure materials in general purpose applications.
 
Sulfur Valved Source  
Sulfur Valved Source   
This corrosion-resistant source generates either cracked or uncracked flux and provides nearly instantaneous flux modulation and on/off control for efficient material conservation.
 
SUMO Source  
SUMO Source   
This patented source is the best available source for non-valved evaporation of high vapor pressure materials, designed for optimal responsiveness and stability.