Epitaxial Equipment : MBE Systems
GEN20 MBE System
The Veeco GEN20™ is an ultra flexible MBE system for materials research and pilot production, integrating designs from Veeco's world-leading R&D and production systems-Veeco's GEN II and GEN200. With the ability to grow single 4" or 3x2" wafers, the GEN20 can be configured with a fully automated cluster tool or a manual transfer system, with possible future upgradeable automation capabilities, making it an ideal lab-to-fab solution.
The standard GEN20 orientation, featuring a vertical source-substrate geometry, optimizes material capacity of sources for longer uptime. In addition, the growth chamber incorporates Veeco's patented LN2 phase separator. This coupled with an exclusive radial vane cryopanel provides a new standard in material and thermal isolation for more control and purity of the growth environment.
The application specific design configurables of the system include, but are not limited to, the cryopanel, manipulator, shutters and in-situ monitoring equipment. Furthermore, the GEN20's 12 MBE source ports, with an option to add two e-beam ports, further enable advanced research on the most challenging materials across the periodic table. Combined with Veeco's new UNI-Bulb RF Plasma Source for Oxygen and oxide-resistant components, the GEN20's e-beam capabilities make it the most advanced oxide/metals R&D system on the market.
The GEN20 is also ideally suited for nitride applications because of its multiple, large, direct-coupled pumping ports with optimized pumping capacity. The system can be tailored for RF nitrogen MBE or ammonia-based MBE utilizing Veeco's nitride components.
The configuration flexibility of the GEN20 ensures the ideal combination of modules, growth environment, and MBE components, allowing for efficient research and process development at a low cost of ownership. The configuration flexibility is available on all three GEN20 models offered by Veeco. They include:
- GEN20MC (manual CAR) integrates the existing GEN II/III platforms (trolley transfer and Varian CAR manipulator). It is an ideal platform for attaching a GEN20 MBE system to an existing GEN II or GEN III system.
- GEN20MZ (manual z-motion) integrates z-motion manipulator, prep chamber, load lock and storage chamber with magnetic transfer rods for transfer of platens. This model can be later upgraded to a GEN20A.
- GEN20A (automated) integrates z-motion manipulator, fully automated cluster tool, and is easily expandable to accommodate separate process chambers, similar to the GEN200/2000 platform.